Turbo-molecular pump having enhanced pumping capacity
US6503050B2 · kind B2 · utility
10Cited by
10References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2000 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Dec 18, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/547
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
In one aspect, a vacuum processing system comprising a vacuum processing chamber and a turbo-molecular pump disposed on the vacuum processing chamber is provided. The turbo-molecular pump comprises a casing having an inlet port and an outlet port, a stator disposed on an inner wall of the casing, a rotor disposed in the stator, and a motor extending coaxially with the rotor, wherein at least the first stage of the pump is enlarged with no correspondingly larger pump components other than the corresponding upper portion of the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.