Components with an anamorphotic effect for reducing an aspect ratio of a raster element in an illumination system
US6507440B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2000 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Jul 8, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided an illumination system for illuminating a field with an aspect ratio other than 1:1 in an image plane. The illumination system includes (a) a light source, and (b) an optical component for transforming the light source into a secondary light source, where the optical component produces an anamorphotic effect that splits the secondary light source into a tangential secondary light source and a sagital secondary light source. The optical component has a first mirror or a first lens, having a raster element. The raster element has an aspect ratio smaller than the aspect ratio of the field in the image plane, and the raster element is imaged into the image plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.