Dynamic quantity sensor having movable and fixed electrodes with high rigidity
US6508126B2 · kind B2 · utility
28Cited by
6References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2001 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Aug 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dynamic quantity sensor has a weigh portion that is supported by a base portion to be displaced by a dynamic quantity, a movable electrode protruding from the weigh portion, and a fixed electrode protruding from the base portion and defining a detection interval with the movable electrode. The detection interval changes in response to displacement of the weight portion for detecting the dynamic quantity. Each of the movable electrode and the fixed electrode has a tapered plane shape with a width that decreases from a root portion toward a tip portion thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.