Planarizer for a semiconductor contactor
US6509751B1 · kind B1 · utility
175Cited by
2References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2000 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Mar 17, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07307
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.