Surface texture measuring apparatus

US6510363B1 · kind B1 · utility

Assignee

• Mitutoyo Corporation · JP

Inventors

• Hiroyuki Hidaka · Miyazaki, JP
• Toshihiro Kanematsu · Yokohama, JP
• Hiroomi Honda · Miyazaki, JP
• Hideki Mishima · Miyazaki, JP
• Takao Ishitoya · Kawasaki, JP

Key dates

• Filing date: Apr 14, 2000
• Grant date: Jan 21, 2003
• Expiry date: Apr 14, 2020

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y35/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A surface texture measuring apparatus allowing effects of vibration disturbance to be removed and a highly accurate measurement to be achieved. The surface texture measuring apparatus is further provided with a small surface texture measuring apparatus, which detects the amount of vibration of a workpiece while maintaining a detecting device in contact with the surface of the workpiece without moving the device along the workpiece. The main surface texture measuring apparatus conducts measurement with a high accuracy based on the detected unevenness value of the surface of the workpiece and on the amount of vibration detected by the small surface texture measuring apparatus.