Patent · US Expired

Methods using dry powder deposition apparatuses

US6511712B1 · kind B1 · utility

7Cited by
43References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 21, 2000
Grant dateJan 28, 2003
Priority date
Expiry dateMar 21, 2020

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB05B5/08
  • WIPO fieldPharmaceuticals
  • WIPO sectorChemistry

Abstract

Provided is a method using a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.