Methods using dry powder deposition apparatuses
US6511712B1 · kind B1 · utility
7Cited by
43References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2000 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Mar 21, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B5/08
- WIPO fieldPharmaceuticals
- WIPO sectorChemistry
Abstract
Provided is a method using a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.