Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages
US6512384B1 · kind B1 · utility
31Cited by
19References
33Claims
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Key dates
| Filing date | Sep 28, 2000 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Sep 28, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Minority carrier diffusion lengths are determined fast, accurately, and conveniently by illuminating a surface of the semiconductor with a beam composed of a plurality of light fluxes each having a different wavelength modulated at a different frequency. Surface photovoltages induced by different light fluxes are simultaneously detected by monitoring surface photovoltage signals at the different modulation frequencies. The surface photovoltage signals are frequency calibrated and then used to calculated a minority carrier diffusion length.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.