Patent assignee · US · COMPANY

Semiconductor Diagnostics, Inc.

14Patents
2Active
14Granted
38Portfolio score

Filing activity: Sep 26, 1994 → Aug 21, 2009 · 2 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6114865A Device for electrically contacting a floating semiconductor wafer having an insulating film Physics 114 Expired
US6597193B2 Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current Physics 103 Expired
US6680621B2 Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current Physics 96 Expired
US5773989A Measurement of the mobile ion concentration in the oxide layer of a semiconductor wafer Emerging Cross-Sectional Technologies 94 Expired
US6569691B1 Measurement of different mobile ion concentrations in the oxide layer of a semiconductor wafer Electricity 55 Expired
US6538462B1 Method for measuring stress induced leakage current and gate dielectric integrity using corona discharge Electricity 50 Expired
US6037797A Measurement of the interface trap charge in an oxide semiconductor layer interface Physics 46 Expired
US6512384B1 Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages Physics 31 Expired
US5663657A Determining long minority carrier diffusion lengths Electricity 29 Expired
US7202691B2 Non-contact method for acquiring charge-voltage data on miniature test areas of semiconductor product wafers Physics 23 Expired
US6771091B2 Method and system for elevated temperature measurement with probes designed for room temperature measurement Physics 6 Expired
US7405580B2 Self-calibration in non-contact surface photovoltage measurement of depletion capacitance and dopant concentration Physics 2 Active
US6815974B1 Determining composition of mixed dielectrics Physics 2 Expired
US8093920B2 Accurate measuring of long steady state minority carrier diffusion lengths Electricity 2 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.