Laser beam monitoring apparatus and method
US6516013B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2000 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Jan 10, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/1305
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An energy stabilization method and system includes an energy detector and simulating optics before the detector for forming a diagnostic portion of an output beam to simulate the beam profile of the working beam incident at the workpiece. Preferably, the simulating optics before the detector are selected to be identical or similar to beam transforming optics that the working beam traverses after the diagnostic portion is split off from the working beam, but before the working beam reaches the workpiece. The diagnostic beam portion is thus formed to have an identical or similar beam profile as the working beam at the workpiece. Alternatively, instead of providing transforming optics along the diagnostic beam path that are the same or similar to those encountered by the working beam, a processor configures the data received at the detector to simulate the beam profile of the working beam at the workpiece, after it traverses the transforming optics described above. The invention has the advantage that the energy in that part of the spatial profile of the working beam which is going to be used for application is stabilized. Particular advantage is achieved when the transforming optics …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.