Substrate transport and apparatus
US6520733B1 · kind B1 · utility
9Cited by
12References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2000 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Nov 14, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transporting method including inputting process data and determining whether a number of units required for processing a wafer is an odd number or an even number. Depending on the number of units required for processing the wafer, steps of transporting the wafer, taking out the wafer from a cassette section, loading the wafer, unloading the wafer and loading the wafer into a cassette section are performed via predetermined arms and with predetermined processing units.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.