Patent · US Expired

Single body injector and deposition chamber

US6521048B2 · kind B2 · utility

28Cited by
51References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 9, 2001
Grant dateFeb 18, 2003
Priority date—
Expiry dateJan 9, 2021

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/45572
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A chemical vapor deposition (CVD) apparatus is provided. The CVD apparatus comprises a deposition chamber and a main chamber. The deposition chamber comprises at least one single injector and one or more exhaust channels. The main chamber supports the deposition chamber and includes at least one gas inlet to inject at least one gas into the main chamber. The gases are removed through the exhaust channels, thereby creating an inwardly flowing purge which acts to isolate the deposition chamber. At least one semi-seal is formed between the deposition chamber and the substrate which acts to confine reactive chemicals within each deposition region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.