Broadband design of a probe analysis system
US6522121B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 20, 2001 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Mar 20, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) probe analysis system has a broadband design. The analysis system includes a sampling unit for generating digital power signals based on a plurality of analog signals. The analog signals characterize power delivered from an RF power delivery system to a plasma chamber. The analysis system further includes a digital processing unit for generating a digital spectrum signal based on the digital power signals. The sampling unit simultaneously samples a first plurality of frequencies from the analog signals such the that digital spectrum signal defines signal levels for the first plurality of frequencies. The sampling unit may also simultaneously sample a second plurality of frequencies from the analog signals such that the digital spectrum signal further defines signal levels for the second plurality of frequencies. The broadband architecture of the sampling unit enables closed loop control of power delivered to the chamber to tolerances unachievable through conventional approaches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.