Non-contact mobile charge measurement with leakage band-bending and dipole correction
US6522158B1 · kind B1 · utility
13Cited by
6References
1Claims
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Key dates
| Filing date | Apr 30, 1997 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Apr 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.