Inventor · Santa Clara, CA, US

Gregory S. Horner

24Patents
10h-index
23Co-inventors
75Inventor score

Filing activity: Jul 7, 1995 → Dec 5, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6121783A Method and apparatus for establishing electrical contact between a wafer and a chuck Electricity 95 Expired
US6097196A Non-contact tunnelling field measurement for a semiconductor oxide layer Physics 83 Expired
US5594247A Apparatus and method for depositing charge on a semiconductor wafer Electricity 82 Expired
US6191605A Contactless method for measuring total charge of an insulating layer on a substrate using corona charge Physics 76 Expired
US6202029A Non-contact electrical conduction measurement for insulating films Physics 64 Expired
US6060709A Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer Electricity 50 Expired
US6734696B2 Non-contact hysteresis measurements of insulating films Physics 48 Expired
US7012438B1 Methods and systems for determining a property of an insulating film Electricity 41 Expired
US7248062B1 Contactless charge measurement of product wafers and control of corona generation and deposition Electricity 20 Expired
US6522158B1 Non-contact mobile charge measurement with leakage band-bending and dipole correction Physics 13 Expired
US6771092B1 Non-contact mobile charge measurement with leakage band-bending and dipole correction Physics 10 Expired
US7075318B1 Methods for imperfect insulating film electrical thickness/capacitance measurement Physics 10 Expired
US7064565B1 Methods and systems for determining an electrical property of an insulating film Physics 9 Expired
US8299416B2 High speed quantum efficiency measurement apparatus utilizing solid state lightsource Emerging Cross-Sectional Technologies 8 Active
US7358748B1 Methods and systems for determining a property of an insulating film Electricity 7 Expired
US8278937B2 High speed detection of shunt defects in photovoltaic and optoelectronic devices Emerging Cross-Sectional Technologies 6 Active
US6937050B1 Non-contact mobile charge measurement with leakage band-bending and dipole correction Physics 5 Expired
US7719294B1 Systems configured to perform a non-contact method for determining a property of a specimen Electricity 5 Active
US7230443B1 Non-contact mobile charge measurement with leakage band-bending and dipole correction Physics 4 Expired
US6335630B1 Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge Physics 3 Expired
US7538333B1 Contactless charge measurement of product wafers and control of corona generation and deposition Electricity 2 Active
US6448804B2 Contactless total charge measurement with corona Physics 2 Expired
US7397254B1 Methods for imperfect insulating film electrical thickness/capacitance measurement Physics 1 Active
US9537444B2 Methods and systems for characterizing photovoltaic cell and module performance at various stages in the manufacturing process Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.