Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system

US6522392B1 · kind B1 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Werner Müller-Rissmann · Oberkochen, DE
• Hubert Holderer · Oberkochen, DE
• Rudolf Von Bünau · Mountain View, US
• Christian Wagner · Rosenheim, DE
• Jochen Becker · Oberkochen, DE
• Stefan Xalter · Oberkochen, DE
• Wolfgang Hummel · Dresden, DE

Key dates

• Filing date: Nov 22, 2000
• Grant date: Feb 18, 2003
• Expiry date: Nov 22, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical system, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. The system comprises a light source (30) as well as at least one optical element, in particular a lens or a mirror. In the region of at least one surface acted upon by the radiation (1) of the light source (30) the optical element is substantially symmetrical in relation to an axis of rotational symmetry (5). The optical element or its housing (6) is rotatably connected to a frame (7) by at least one bearing (8, 9, 10). An actuator (18) sets the optical element (25) or its housing (6) in rotation about the axis of rotational symmetry (5). The actuation cooperates with a control device (23). The latter activates the actuator (18) for rotation of the optical element at least temporarily during the period, when the optical element is exposed to lumination. In such a manner rotationally non-symmetrical image defects are compensated.