Transmitting spectral filtering of high power extreme ultra-violet radiation
US6522465B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2001 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Sep 27, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/702
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In one embodiment of the invention, a transmitting spectral filter includes a thin film layer and a grating structure. The thin film layer is made of transmitting material to transmit a first incident radiation within a first band around a first wavelength. The first incident radiation is reflected from a mirror in an optical path. The grating structure is deposited on the thin film layer and is etched to have a grating period. The grating period causes transmission of the first incident radiation within the first band and causes at least one of reflection and diffraction of the second incident radiation above a second wavelength out of the optical path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.