Facility for treating objects in a process tank
US6523552B2 · kind B2 · utility
3Cited by
33References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 7, 1998 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Jul 7, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing tank has at least one fluid distribution device for introducing a treatment fluid. The fluid distribution device has at least one porous hollow rod, at least one porous plate, at least one capillary plate, or at least one single-ply or multi-ply fabric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.