Fused silica pellicle
US6524754B2 · kind B2 · utility
19Cited by
34References
36Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 22, 2001 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Feb 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fused silica pellicle for use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle may be secured to the photomask using an adhesive or a slide rail system, or may be held in place using a static charge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.