Scanning electron microscope
US6528787B2 · kind B2 · utility
20Cited by
2References
16Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 30, 2000 |
| Grant date | Mar 4, 2003 |
| Priority date | — |
| Expiry date | May 24, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope capable of imaging a specimen at a magnification lower than the minimum magnification of the microscope. The specimen surface is virtually partitioned into cells. The specimen is so moved that the cells can be individually scanned by the electron beam and hence image data can be taken from each cell. Image data derived from each cell by the scan is stored in locations of an image memory that are addressed corresponding to the positions of the cells.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.