Temperature measuring system
US6530687B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2000 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Feb 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention aims to exclude the influence of stray light dye to a heating lamp when measuring the temperature of an object to be treated, such as a wafer, with the use of a radiation thermometer. The present invention utilizes the relationship between a power W supplied from an output control section 28 to lamps 22 and optical energy radiated from the lamps 22. Influence which the light radiated from the lamps 22 exerts on the output voltage of a photodiode 18 is experimentally found beforehand as a function of the power W, and stored in a computing section 26. The computing section 26 subtracts the influence of stray light from the lamps 22, which is included in the output voltage of the photodiode 18, from the output value of the photodiode 18 on the basis of the value of the power W transmitted from the output control section 28, and calculates the temperature of a susceptor 8.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.