Process for producing acid sensitive liquid composition containing a carbonate
US6531267B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 11, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Apr 11, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/168
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Disclosed is a method for producing an acid sensitive liquid composition. The method involves passing an acid sensitive liquid composition containing a carbonate represented by the formula ROC(═O)OR1 wherein R and R1 independently are a hydrocarbyl group of 1 to about 10 carbon atoms, through at least one of the following two filter sheets: (a) a filter sheet containing a self-supporting fibrous matrix having immobilized therein a particulate filter aid and a particulate ion exchange resin having an average particle size of from about 2 to about 10 microns, wherein the particulate filter aid and ion exchange resin particles are distributed substantially uniformly throughout a cross-section of said matrix; and/or (b) a filter sheet containing a self-supporting matrix of fibers having immobilized therein particulate filter aid and binder resin, and having an average pore size of about 0.05 to 0.5 &mgr;m. Also disclosed is a method for treating a film of a photoresist composition disposed on a surface, which involves contacting the photoresist composition with an acid sensitive liquid composition prepared by the aforementioned method, in an amount sufficient to produce a substant…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.