Alpha particle shield for integrated circuit
US6531759B2 · kind B2 · utility
8Cited by
15References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Feb 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit, comprising: a semiconductor substrate, a plurality of last metal conductors disposed above said substrate, a bottom metallic layer disposed on said last metal conductors, a top metallic layer, and an alpha absorber disposed between said bottom and top metallic layers, said alpha absorber consisting essentially of a high-purity metal which is an alpha-particle absorber. The metal is, for example, of Ta, W, Re, Os or Ir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.