Image registration apparatus having an adjustable reflective diffraction grating and method
US6532097B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2001 |
| Grant date | Mar 11, 2003 |
| Priority date | — |
| Expiry date | Oct 11, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70291
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An image registration apparatus has a substrate support capable of supporting a substrate, the substrate support having a support motor capable of moving the substrate support. A radiation beam source is provided that is capable of providing a radiation beam. A beam intensity modulator is also provided that has an adjustable reflective diffraction grating capable of reflectively diffracting the radiation beam to modulate the intensity of the radiation beam. A controller is also provided that is adapted to control the substrate support, radiation beam source, and beam intensity modulator to modulate and scan the radiation beam across the substrate to register an image on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.