Patent · US Expired

Method for fabricating multi-layered substrates

US6534381B2 · kind B2 · utility

74Cited by
20References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 4, 2000
Grant dateMar 18, 2003
Priority date
Expiry dateJan 4, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76251
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for forming a multi-layered substrate. The method includes forming a compliant layer on a face of a first substrate (10). Joining the compliant layer against a face of a second substrate (20), where the compliant layer forms around a surface non-uniformity on the second substrate face.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.