Patent · US Expired

Piezoresonator

US6534900B2 · kind B2 · utility

80Cited by

12References

14Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Robert Aigner · Winter Garden, US
Stephan Marksteiner · Putzbrunn, DE

Key dates

Filing date	Feb 20, 2001
Grant date	Mar 18, 2003
Priority date	—
Expiry date	Feb 20, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02204
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A thin film piezoresonator, which can be tuned over a wide range of RF frequencies, includes a piezo layer between a first electrode layer and a second electrode layer. An electroactive layer of an electrostrictive material, which experiences a mechanical deformation when an electrical voltage is applied, is disposed between a third electrode layer and the second electrode layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.