Device for treating a disc-shaped object
US6536454B2 · kind B2 · utility
47Cited by
21References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 1, 2001 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Sep 2, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a device for treating at least one bottom of a disc-shaped object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.