Patent · US Expired

Actuator component for a microspray and its production process

US6536682B1 · kind B1 · utility

6Cited by

7References

14Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Ralf Schnupp · Herzogenaurach, DE
Jochen Thomas · Munich, DE

Key dates

Filing date	Jun 17, 2002
Grant date	Mar 25, 2003
Priority date	—
Expiry date	Jun 17, 2022

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB05B17/0607
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

An actuator component for a piezoelectrically-driven microatomizer comprises a diaphragm formed in a semiconductor substrate, a piezoelectric actuator which is arranged on a surface of the diaphragm and by means of which the diaphragm can be caused to vibrate, and a passage formed in the semiconductor substrate and used for supplying a liquid to be atomized from an inlet end to the diaphragm surface located opposite the piezoelectric actuator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.