Wafer boat support and method for twin tower wafer boat loader
US6537010B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2001 |
| Grant date | Mar 25, 2003 |
| Priority date | — |
| Expiry date | Apr 7, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilever paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translation mechanisms (34A,B) each include a stationary part (62,63) and a vertically moveable support (61). First and second horizontal translation mechanisms (50A,B) each have a base (86) supported by one of the vertically moveable supports and a horizontally moveable arm (51) supported by the base (86). A horizontal boat support assembly (102) supports the loaded wafer boats and has an end supported by a first horizontally moveable arm (51A) and another end supported by a second horizontally moveable arm (51B). A stationary rail (97) has its ends supported by the first and second horizontally moveable arms, and a moveable rail (96) is supported by outer ends of first and second rotary arms to bring the moveable rail into a lower first position to engage an edge of each of the wafer boats (24) and to an upper second position above wafers in the wafer boats to clear the wafers as the first and second horizontal translation mechanisms are…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.