Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
US6541676B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1999 |
| Grant date | Apr 1, 2003 |
| Priority date | — |
| Expiry date | Dec 2, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24998
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to gas separation membranes including a metal-based layer having sub-micron scale thicknesses. The metal-based layer can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series of perforations (holes) can be patterned to allow chemical components to access both sides of the metal-based layer. Heaters and temperature sensing devices can also be patterned on the membrane. The present invention also relates to a portable power generation system at a chemical microreactor comprising the gas separation membrane. The invention is also directed to a method for fabricating a gas separation membrane. Due to the ability to make chemical microreactors of very small sizes, a series of reactors can be used in combination on a silicon surface to produce an integrated gas membrane device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.