Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component

US6541833B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Wolfgang Werner · Hersbruck, DE
• Stefan Kolb · Unterschleißheim, DE

Key dates

• Filing date: Feb 27, 2001
• Grant date: Apr 1, 2003
• Expiry date: May 6, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24331
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The method for producing a micromechanical component includes the following steps: producing a semi-finished micromechanical component; producing openings and forming a cavity; sealing the opening with sealing lids; removing material on the top surface of the first membrane layer, the surface of the first membrane layer being exposed and planarized. The invention also relates to a micromechanical component which can be produced according to the above method and to its use in sensors such as pressure sensors, microphones, or acceleration sensors.