High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM
US6545277B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2000 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Dec 6, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2443
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high efficiency enhanced detecting light guide scintillator detector for charged particle beam apparatus, wherein primary beam passes through the light guide scintillator detector. Light guide scintillator detector is formed as a fork-like part having an open area covering effectively the same area in which the shadow of the primary beam shielding causes low efficiency detection of impinging charged particles. There is further provided a conductive grid or mesh-sheet fitted in the open area between the prongs of the fork-like part biased at various electric potentials inducing one out of many desired possible interactions with detected charged particles such as e.g. deflection and generation of SE's.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.