Patent · US Expired

Roof configuration for laser discharge electrodes

US6546036B1 · kind B1 · utility

3Cited by

17References

36Claims

0Family size

Assignee

Lambda Physik AG · DE

Inventors

Igor Bragin · Göttingen, DE
Vadim Berger · Oebisfelde, DE

Key dates

Filing date	Jun 6, 2000
Grant date	Apr 8, 2003
Priority date	—
Expiry date	Apr 5, 2021

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/0977
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method and devices for preionizing the main discharge gas volume of a gas discharge laser are described. The method and devices provide a preionizing discharge to the main gas discharge volume from above or below the main gas discharge volume. In combination with a shielding arrangement which reduces the spread of the preionization discharge other than to the main gas discharge volume, the exposure of other laser components and gas volumes to said preionization discharge is thereby minimized.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.