Signal-to-noise ratio optimization of multiple-response design-of-experiment
US6546522B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 6, 1999 |
| Grant date | Apr 8, 2003 |
| Priority date | — |
| Expiry date | Aug 6, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/024
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for evaluating design-of-experiment is disclosed. The method includes an optimization method for use in fabricating a semiconductor integration circuit device, wherein the factors are simplified as a single number. The solution procedure is described as the related statement using some cases related about polysilicon deposition and device fabrication process as the sample to illustrate the implementation of this invention. Also, in the embodiment, the present invention is proposed to solve the problem of uncertain preferences from decision-makers. This invention will optimize the weight or the relative importance of each attribute with respect to process conditions and thus does not need any preference from process engineers herein. Therefore, according to the above description, this invention is for solving multiple-criteria problems of very-large-semiconductor-integration (VLSI) manufacturing process. Generally VLSI process optimization is inherently a multiple-objectives problem because the process engineers always want to attain more than one objective at the same time. Especially, the Taguchi Method is the most effective design-of-experiments (DOE) method but its appl…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.