Method for compensating the position offset of a capacitive inertial sensor, and capacitive inertial sensor
US6546799B1 · kind B1 · utility
9Cited by
8References
25Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 8, 2000 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | Sep 8, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inertial sensor having a stator and a rotor made of semiconductor material and electrostatically coupled together, and a microactuator also made of semiconductor material, coupled to the rotor and controlled so as to move the rotor itself and thus compensate for the position offset thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.