Micro-machined mechanical structure and device incorporating the structure
US6546801B2 · kind B2 · utility
17Cited by
5References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 23, 2001 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | Apr 23, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mechanical structure (100) comprises a moving mass (3) suspended by beams (4, 5, 6, 7) from a fixed frame (2). The structure (100) comprises elongation means (23-26) mechanically connected to each of the beams (4, 5, 6, 7). The elongation means is designed such that the stiffness of the beams (4, 5, 6, 7) varies only little during movement of the moving mass. The structure is characterized in that the response of an elongation means is asymmetric when acting in tension and in compression. The structure is thus made insensitive to accelerations along a direction parallel to the suspension direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.