Method and apparatus for multifunction vacuum/nonvacuum annealing system
US6546820B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2000 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | Feb 11, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0282
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is disclosed for in situ characterizing and quantifying physical properties of thin film materials over time and in various environments. Through the utilization of multiple probes and sensors, and the processing of the data, a rapid and accurate forecast of the material's behavior in a selected environment may be obtained. The present invention scans for a variety of properties, including film stress, film thickness, desorption, reflectivity, and resistivity. Photodetectors are used to collect reflected light which is processed by computer for analysis, while simultaneously processing data collected from the probes and sensors placed within and without the testing chamber. Data is collected and analyzed over time while sample materials are subjected to selected environments, including thermal cycling and gaseous or vacuum environments, using multiple probes according to the user's industry needs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.