Methods of measuring moving objects and reducing exposure during wavefront measurements
US6547395B1 · kind B1 · utility
20Cited by
11References
26Claims
0Family size
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Key dates
| Filing date | Feb 22, 2000 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | Feb 22, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Metrology is performed using short, temporally resolved measurements in order to “freeze” the deformation of the object at a particular instant in time. The pulsed light beams are used to conduct metrology of moving objects and objects which are moved relative to the detector for measurement thereof. The motion may be translational, spiral and/or rotational. The duty cycle of the light source may be varied to in accordance with the control of the operation of the detector to perform metrology using a reduced total exposure of an object, while increasing the amount of light available for the measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.