Patent · US Expired

Magnetic yoke structures in MRAM devices to reduce programming power consumption and a method to make the same

US6548849B1 · kind B1 · utility

32Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2002
Grant dateApr 15, 2003
Priority date
Expiry dateJan 31, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG11C11/1675
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

An MRAM device includes a substrate; plural conductive lines, including a bit line and a word line; and a MTJ stack including a pair of magnetic yoke structures, wherein each of said yoke structures surrounds a conductive line. A method of fabricating a magnetic yoke in an MRAM structure includes preparing a substrate; forming a first conductive line on the substrate; fabricating a MTJ stack, including fabricating a first magnetic yoke structure about the first conductive line; forming a second conductive line on the MTJ stack; fabricating a second magnetic yoke about the second conductive line; depositing a layer of oxide on the structure; and metallizing the structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.