Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipsometry and polarimetry systems
US6549282B1 · kind B1 · utility
12Cited by
10References
2Claims
0Family size
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Key dates
| Filing date | Oct 18, 1999 |
| Grant date | Apr 15, 2003 |
| Priority date | — |
| Expiry date | Oct 18, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.