Electric device and method of driving the same
US6550325B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1993 |
| Grant date | Apr 22, 2003 |
| Priority date | — |
| Expiry date | Oct 27, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/688
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermistor layer made of platinum is formed on a thin diamond film. An amount of heat carried away from the diamond film by a fluid is detected as a change in the temperature of the thermistor layer. The rear side of the diamond film is kept in contact with the fluid to prevent the material of the thermistor from being corroded by the fluid. In another aspect of the invention, a heating element and a thermistor are formed on one surface of a thin diamond film. The other surface is kept in contact with a fluid. The diamond film is heated by the heating element in a quite short time of about 0.2 second. The resulting response characteristics of the diamond film are detected by the thermistor. The flow rate is calculated from the response characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.