Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same
US6554906B1 · kind B1 · utility
31Cited by
6References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Apr 13, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer holder is configured of a pair of ceramic base members and conductive layers each posed between the ceramic base members. The conductive layer has a body facing a wafer and an extension protruding from the body to the outside of a vacuum chamber for external electrical connection, wherein the body and the extension are arranged in a single plane. Thus there can be obtained a wafer holder for use with a semiconductor manufacturing apparatus that can reduce such distortion as caused when it is heated and cooled and that can also be readily manufactured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.