Hirohiko Nakata
68Patents
13h-index
37Co-inventors
80Inventor score
Filing activity: Oct 27, 1988 → Feb 2, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7090394B2 | Temperature gauge and ceramic susceptor in which it is utilized | Physics | 455 | Expired |
| US6963052B2 | Heater module for semiconductor manufacturing equipment | Electricity | 398 | Expired |
| US6460482B1 | Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Electricity | 336 | Expired |
| US6261703A | Copper circuit junction substrate and method of producing the same | Emerging Cross-Sectional Technologies | 49 | Expired |
| US6122170A | Power module board and power module using the board | Electricity | 37 | Expired |
| US6554906B1 | Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same | Electricity | 31 | Expired |
| US6664515B2 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Electricity | 30 | Expired |
| US6508884B2 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Electricity | 27 | Expired |
| US7268322B2 | Semiconductor heating apparatus | Electricity | 26 | Expired |
| US6365879B1 | Wafer holder for semiconductor manufacturing apparatus | Electricity | 24 | Expired |
| US5732318A | Heater and heating/fixing unit comprising the same | Physics | 20 | Expired |
| US6403510B1 | Aluminum nitride sintered body and manufacturing method thereof | Electricity | 14 | Expired |
| US5023147A | Ceramics-metal jointed body | Emerging Cross-Sectional Technologies | 13 | Expired |
| US4999144A | Pressure self-combustion sintering method | Chemistry; Metallurgy | 13 | Expired |
| US6423400B1 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6384378B2 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Electricity | 12 | Expired |
| US6271163A | Aluminum nitride sintered body and method of preparing the same | Electricity | 12 | Expired |
| US5998043A | Member for semiconductor device using an aluminum nitride substrate material, and method of manufacturing the same | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5679469A | Metallized ceramic substrate having smooth plating layer and method for producing the same | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6392197B2 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Physics | 10 | Expired |
| US6049064A | Heat fixing device for fixing a toner image | Physics | 9 | Expired |
| US7576303B2 | Wafer holder, and wafer prober provided therewith | Electricity | 9 | Active |
| US6174614A | Sintered aluminum nitride body and metallized substrate prepared therefrom | Chemistry; Metallurgy | 7 | Expired |
| US7045045B2 | Workpiece holder for processing apparatus, and processing apparatus using the same | Electricity | 7 | Expired |
| US6671489B2 | Thermal fixing apparatus | Physics | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.