High precision flexure stage
US6555829B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Jan 10, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20264
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 &mgr;m). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.