Projection imaging system with a non-circular aperture and a method thereof
US6556361B1 · kind B1 · utility
5Cited by
9References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Mar 17, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70425
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A imaging tool for use with a mask with features oriented along at least an x-axis or a y-axis where the x-axis extends in directions substantially perpendicular to the directions of the y-axis. The tool has a condenser lens with a condenser plate which is located in a condenser lens pupil plane and which has a condenser aperture with four-sides. The sides of the condenser aperture are oriented in substantially the same direction as either the x-axis or the y-axis. The condenser lens is positioned to place at least a portion of any illumination on at least a portion of the mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.