Bruce W. Smith
29Patents
11h-index
9Co-inventors
68Inventor score
Filing activity: Sep 3, 1974 → Nov 14, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6881523B2 | Optical proximity correction method utilizing ruled ladder bars as sub-resolution assist features | Physics | 112 | Expired |
| US4209069A | Drills with chip collectors | Emerging Cross-Sectional Technologies | 73 | Expired |
| US5939227A | Multi-layered attenuated phase shift mask and a method for making the mask | Physics | 39 | Expired |
| US7136143B2 | Method for aberration detection and measurement | Physics | 38 | Expired |
| US6466304B1 | Illumination device for projection system and method for fabricating | Physics | 37 | Expired |
| US4053667A | Stiffened structural laminate and method of molding laminate with stiffener beads | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6525806B1 | Apparatus and method of image enhancement through spatial filtering | Physics | 23 | Expired |
| US6388736B1 | Imaging method using phase boundary masking with modified illumination | Physics | 23 | Expired |
| US6395433B1 | Photomask for projection lithography at or below about 160 nm and a method thereof | Physics | 17 | Expired |
| US7233887B2 | Method of photomask correction and its optimization using localized frequency analysis | Physics | 16 | Expired |
| US6309780A | Attenuated phase shift mask and a method for making the mask | Physics | 11 | Expired |
| US6846595B2 | Method of improving photomask geometry | Physics | 7 | Expired |
| US6531656B1 | Supply line alignment apparatus for supply column | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US6556361B1 | Projection imaging system with a non-circular aperture and a method thereof | Physics | 5 | Expired |
| US6821296B2 | Device for delivering a radioactive and/or drug dosage alone or in connection with a vascular stent | Human Necessities | 5 | Expired |
| US6788388B2 | Illumination device for projection system and method for fabricating | Physics | 5 | Expired |
| US6934010B2 | Optical proximity correction method utilizing gray bars as sub-resolution assist features | Physics | 3 | Expired |
| US6480263B1 | Apparatus and method for phase shift photomasking | Physics | 3 | Expired |
| US7170588B2 | Reduction Smith-Talbot interferometer prism for micropatterning | Physics | 2 | Expired |
| US7345735B2 | Apparatus for aberration detection and measurement | Physics | 2 | Active |
| US6791667B2 | Illumination device for projection system and method for fabricating | Physics | 1 | Expired |
| US7768648B2 | Method for aberration evaluation in a projection system | Physics | 1 | Active |
| US6541750B1 | Modification of a projection imaging system with a non-circular aperture and a method thereof | Physics | 1 | Expired |
| USRE40239E1 | Illumination device for projection system and method for fabricating | General | 1 | Expired |
| USRE39349E1 | Masks for use in optical lithography below 180 nm | General | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.