Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch
US6556737B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2000 |
| Grant date | Apr 29, 2003 |
| Priority date | — |
| Expiry date | Jan 30, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fiber-optic microswitch is disclosed that includes a flexible mirror positioning structure including an outer fixed frame, a movable platform upon which a mirror is formed, and two or more resilient support members (e.g., monocrystalline silicon springs or torsion beams) connecting the movable platform to the fixed frame. Stationary fibers are mounted over the mirror. An electromagnetic drive mechanism is provided for positioning the movable platform relative to the fixed frame. The electromagnetic drive mechanism includes one or more coils formed on a drive substrate mounted under the monocrystalline structure, and one or more pole pieces that are mounted on the movable platform. Currents are selectively applied to the coils to generate attractive electromagnetic forces that pull the pole pieces, thereby causing the movable platform to move (e.g., tilt) relative to the fixed frame, thereby selectively directing light from one fiber to another. Various monocrystalline structures are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.