Integrated Micromachines, Inc.
6Patents
0Active
6Granted
28Portfolio score
Filing activity: Mar 24, 1997 → Mar 12, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5821596A | Batch fabricated semiconductor micro-switch | Physics | 99 | Expired |
| US6343178B1 | Micromachined voltage controlled optical attenuator | Physics | 60 | Expired |
| US6700174B1 | Batch fabricated semiconductor thin-film pressure sensor and method of making same | Electricity | 47 | Expired |
| US6542653B2 | Latching mechanism for optical switches | Physics | 33 | Expired |
| US6262463A | Micromachined acceleration activated mechanical switch and electromagnetic sensor | Electricity | 27 | Expired |
| US6556737B1 | Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch | Physics | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.