Refillable ampule and method re same
US6557593B2 · kind B2 · utility
9Cited by
31References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2001 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Jul 16, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F23/72
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.