Non-hermetic packaging for lithium niobate-based devices
US6560377B2 · kind B2 · utility
10Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2001 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Oct 1, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithium niobate-based electro-optic device is formed to include a parylene conformal coating layer, as a sealant against moisture. The use of parylene (preferably, parylene-C) has been found to form an acceptable moisture vapor barrier without the need for additional hermetic packaging of the electro-optic device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.