Assembling arrays of small particles using an atomic force microscope to define ferroelectric domains
US6562633B2 · kind B2 · utility
7Cited by
16References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2001 |
| Grant date | May 13, 2003 |
| Priority date | — |
| Expiry date | May 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/962
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of assembling arrays of small particles or molecules using an atomic force microscope to define ferroelectric domains includes depositing a ferroelectric thin film upon a substrate forming workpiece, then using an atomic force microscope having a conductive, tip for generating a pattern on this thin film to define desired nano-circuit patterns. Next, exposure of this thin film to a solution containing chemical species which selectively adsorb or accumulate under the influence of electrophoretic forces in selected regions of this thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.